ARIS-i line

Basic Applications

Curriculum

Who should attend?

This course is designed for those individuals in the semiconductor industry who require the knowledge and skills to perform routine maintenance on ARIS-i line mask inspection system

Course Objective and Summary

Identify Locate and describe all safety hazards associated with the basic operations of the ARIS-i line mask inspection system

Describe Locate and describe the main components and capabilities of the ARIS-i line mask inspection system.

Perform a review job

Program a recipe for an automatic review

Optimize a recipe

Apply Best Known Methods (BKMs)

Review the results

information

Course Benefits

* Increase functional knowledge of ARIS-i line system components and subcomponents

* Improve automatic defect review success rates by optimized programming of recipes

Course Information

Prerequisites: None

Course location: Classroom and Cleanroom in the GTi Application Lab
Course Length: 5 working days

Maximum Number of attendees: 4

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