INSPECTION TOOL EXPERTS

Through innovation and expertise, RT-EX extends the lifetime of RT Mask Inspection Tools by providing engineering solutions, support, and by custom tailoring Refurbishment Tools to our customer’s requirement.

OUR SERVICES

REMANUFACTURE

RT8xx
Mask inspection G Line​​​
ARISi
Mask inspection I Line

INSPECTION SYSTEMS

Hardware and
Application Support

Flexible service support contacts

REPAIR

ARISi
Boards, Computers, Motion
RT8xx
Boards, Computers, Motion

REPAIR

Parts in stock
Test and repair capabilities
Legagy + Obsolescence
Engineering Solutions

APPLICATION

Application support
New recipes
New products

TELIT SecureWISE

Remote Terminal Access
RGet real-time visibilit

MAIN ACTIVITIES

DEFECT REVIEW
MASK INSPECTION

Defect review and classification done on the tool in classification mode with two options:
- Online review - Optics image
- Offline review - Data base image
- High magnification, defect review
- Direct communication for repair machine
Classification reports :
- Defect map
- Defect size
- Defect type

RT TOOLS MAGNIFICATION
AND PIXEL SIZE

RT Inspection Tools for Die to Data Base Only
RT 8xxx magnifications: (choose 3)
RT 8000
- M2 (X26) – pix 0.72
- M2 (X34) – pix 0.5
- M1 (X45) – pix 0.4
- M0 (X64) – pix 0.28
RT 8100/8200
- M0 (X80) – pix 0.22
ARISi
M0 (X82) – pix 0.19

RT TOOLS LINE THICKNESS SPEC

RT Inspection Tools for Die to Data Base Only
RT 8xxx magnifications: (choose 3)
RT 8000

- M2 (X26) – pix 0.72
- M2 (X34) – pix 0.5
- M1 (X45) – pix 0.4
- M0 (X64) – pix 0.28
RT 8100/8200
- M0 (X80) – pix 0.22
ARISi
M0 (X82) – pix 0.19

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