NANOSEM 3D™

*Multiple Systems Available

The NanoSEM 3D system’s exceptional in-line accuracy and process control eliminate more time-consuming and costly off-line wafer cross-sectioning while helping chipmakers to streamline process development, improve device performance and yield, and shorten ramp times to high-volume production.

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General Info

• Model: AMAT NanoSEM 3D
• Description: Critical Dimension System
• Wafer Size: 300mm
• Serial Number: Multiple Units Available
• Warranty: As Is or Refurbished to Customer Spec

Specifications

• CE Marked

  Install Type: Stand Alone

  Cassette Interface: (3) 300mm FOUP

  Roll-Around Ergo-Station w/Touch-Screen

  Status Lamp

Software Options

• Slope Reconstruction

• CH Analysis

• Profile Grade

• Discrete Inspection

• Defect Review

• ARAMS (ES8

Power Requirements

• Loader: AMAT ADO with RFID
• Wafer Size: 300mm
• ETU 300mm
• ITU 300mm