About Green Technology Investments

Metrology Experts



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Through innovation, GTi is able to provide systems which are tailor-made to customers’ requirements.

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Our Vision

To create and address the needs of companies through innovative solutions in the ever-evolving, challenging and ever-shrinking world of semiconductor manufacturing.

To invest in R&D and extend newer technologies to mature applications.

To provide OEM-class service and support for these systems now and for many years to come.

Our Mission

To provide optimized systems for our customers’ needs.

To meet the growing demand for Inspection and Metrology capability in the semiconductor world through innovation.

To be the experts our customers require.

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Dozens of engineers across the world with decades of experience

Invent Innovate Inspire

Since 2012, GTI has been providing Inspection and Metrology solutions for CD-SEM, Defect Review SEM and Dark Field Inspection, delivering fully remanufactured systems, boasting an extensive inventory of ready-to-ship spare parts, and offering expert service and applications support.



System sales


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